PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

作者Jiaxing Ren; Shuohan Wang; Fuminobu Kimura; Yusuke Kajihara

作者单位Graduate School of Engineering, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8505, Japan; Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8505, Japan

作者Sisay Workineh Agebo; Dawid Zieliński; Mariusz Deja

作者单位Doctoral School at Gdańsk University of Technology, Gabriela Narutowicza Street 11/12, 80 - 233, Gdańsk, Poland; Faculty of Mechanical Engineering and Ship Technology, Department of Manufacturing and Production Engineering, Institute of Machine and Materials Technology, Gdańsk University of Technology, Gabriela Narutowicza Street 11/12, 80 - 233, Gdańsk, Poland

作者Kiyoto Kayao; Kota Kikkawa; Jumpei Yamada; Yasuhisa Sano; Kazuto Yamauchi; Daisetsu Toh

作者单位Department of Precision Engineering, Graduate School of Engineering, The University of Osaka, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan; Research Center for Precision Engineering, Graduate School of Engineering, The University of Osaka, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan; OSAKA UNIVERSITY-RIKEN Center for Science and Technology, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan

作者Takuya Shiohara; Yoshihiro Maeda

作者单位Seiko Epson Corporation, Suwa, 6128418, Nagano, Japan; Electrical and Electronics Program, Department of Engineering, Nagoya Institute of Technology, Nagoya, 4668555, Aichi, Japan

作者Johannes Wiesböck; Georg Schitter; Ernst Csencsics

作者单位Mechatronics and Power Electronics Institute, TU Wien, Vienna, 1040, Austria; Christian Doppler Laboratory for Precision Measurements in Motion, Mechatronics and Power Electronics Institute, TU Wien, Vienna, 1040, Austria

作者Liangliang Mo; Chi Fai Cheung; Da Li; Mingjun Ren

作者单位State Key Laboratory of Ultra-Precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong Special Administrative Region of China; Institute of Modern Optics, Nankai University, Tianjin, 30071, China; State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China

作者Daniel Pechgraber; Ernst Csencsics; Georg Schitter

作者单位Mechatronics and Power Electronics Institute TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria

作者Kota Takashima; Kenji Yanagisawa; Daisuke Kono; Keisuke Hara; Naofumi Tsuji; Hirofumi Kawamura; Hiromi Isobe

作者单位Nagaoka University of Technology, 1603-1, Kamitomioka, Nagaoka, 940-2137, Niigata, Japan; Otemon Gakuin University, 2-1-15, Nishiai, Ibaraki, 567-8502, Osaka, Japan; Kyoto University, Nishikyo-ku, Kyoto, 615-8540, Kyoto, Japan; National Institute of Technology, Ichinoseki College, Takanashi, Hagisho, Ichinoseki, 021-8511, Iwate, Japan; National Institute of Technology, Akita College, 1-1, Iijimabunkyo, Akita, 011-8511, Akita, Japan